Title
Investigation of nanoscratch processes in semiconductor materials for application to maskless patterning
Authors
[ 1 ] Instytut Fizyki, Wydział Fizyki Technicznej, Politechnika Poznańska | [ P ] employee
Year of publication
2008
Published in
Article type
scientific article
Publication language
english
Pages (from - to)
3020 - 3029
Impact Factor
1,929
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