Title
Physics and chemistry of solid state changes on the silicon surface radiating it by halocarbon and/or hydrogen plasma
Authors
[ 1 ] Instytut Fizyki, Wydział Fizyki Technicznej, Politechnika Poznańska | [ P ] employee
Year of publication
2004
Article type
scientific article
Publication language
polish
Pages (from - to)
229 - 233
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