Porous silicon formation by mechanical means
[ 1 ] Instytut Inżynierii Materiałowej, Wydział Budowy Maszyn i Zarządzania, Politechnika Poznańska | [ P ] pracownik
2018
rozdział w monografii naukowej
angielski
EN In this chapter a mechanical method of porous silicon formation is described. By applying high-energy ball milling to polycrystalline silicon powder or single crystalline silicon wafers, highly dispersed and nanocrystalline silicon powders are produced. Pressing and sintering then lead to a porous matrix. The macroporous structures made in this way can then be permeated by meso- and micropores. The sinters have isotropic character of the pore distribution and morphology; this method is not limited by the wafer dimensions, and it is possible to make large-scale porous bodies, which is an advantage in comparison to lithographic methods.
111 - 120
Poznan University of Technology