Porous silicon formation by mechanical means
[ 1 ] Instytut Inżynierii Materiałowej, Wydział Budowy Maszyn i Zarządzania, Politechnika Poznańska | [ P ] employee
2015
chapter in monograph
english
EN In this chapter a mechanical method of porous silicon formation is described. By applying high-energy ball milling to polycrystalline silicon powder or single crystalline silicon wafers, highly dispersed and nanocrystalline silicon powders are produced. Pressing and sintering then lead to a porous matrix. The macroporous structures made in this way can then be permeated by meso- and micropores. The sinters have isotropic character of the pore distribution and morphology; this method is not limited by the wafer dimensions, and it is possible to make large-scale porous bodies, which is an advantage in comparison to lithographic methods.
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