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Article

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Title

Roughness of silicon after chemical and electrochemical etching

Authors

[ 1 ] Instytut Inżynierii Materiałowej, Wydział Budowy Maszyn i Zarządzania, Politechnika Poznańska | [ P ] employee

Year of publication

2004

Published in

Inżynieria Materiałowa

Journal year: 2004 | Journal number: nr 3

Article type

scientific article

Publication language

english

Pages (from - to)

215 - 217

Presented on

Advanced Materials and Technologies, AMT'2004 : XVII Physical Metallurgy and Materials Science Conference, 20-24.06.2004, Łódź, Polska

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