Title
Roughness of silicon after chemical and electrochemical etching
Authors
[ 1 ] Instytut Inżynierii Materiałowej, Wydział Budowy Maszyn i Zarządzania, Politechnika Poznańska | [ P ] employee
Year of publication
2004
Published in
Article type
scientific article
Publication language
english
Pages (from - to)
215 - 217
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