Comparing repeatability and reproducibility of topographic measurement types directly using linear regression analyses of measured heights
[ 1 ] Instytut Technologii Mechanicznej, Wydział Inżynierii Mechanicznej, Politechnika Poznańska | [ P ] employee
2024
scientific article
english
- Surface
- Topography
- Precision
- Repeatability
- Uncertainty
EN This paper describes and illustrates a convenient, new method for checking repeatability and reproducibility by direct comparisons of measured heights. Focus variation, confocal, and interferometric optical areal profiling have been integrated as modes on the Sensofar S neox and are used here. Repeated, sequential measurements are made with these different types of measurement without repositioning the measurand. Several different positions are measured on the same measurand, an electroformed, standard areal surface with an irregular topography. Height (z) measurements at individual locations (x,y) are plotted between repeated measurements at the same position on the measurand, and are called H–H plots. These plots can be used for rapid evaluations of topographic measurement repeatability on ordinary topographic measurements. Exceptionally, such plots can also be used to see how well one type of measurements can reproduce another, such as confocal, focus variation, and interferometric, when they are integrated as modes on the same measurement instrument. Only when different types of measurement are included as modes on the same instrument can different measurement types be compared directly for reproducing each of the large numbers of locations (>105) in topographic measurements at the same position on a measurand. One way of quantifying repeatability and reproducibility is with coefficients of determination (R2) and slopes of linear regression analyses on these H–H plots.
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