Title
A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision
Authors
[ 1 ] Instytut Technologii Mechanicznej, Wydział Inżynierii Mechanicznej, Politechnika Poznańska | [ P ] employee | [ S ] student
Scientific discipline (Law 2.0)
Year of publication
2020
Article type
scientific article
Publication language
english
Keywords
EN
- scatterometry
- surface texture
- optical measurement systems
- surface metrology
- surface roughness
Pages (from - to)
485 - 490
License type
CC BY-NC-ND (attribution - noncommercial - no derivatives)
Open Access Mode
open journal
Open Access Text Version
final published version
Date of Open Access to the publication
at the time of publication
Ministry points / journal
100
Ministry points / journal in years 2017-2021
100
Impact Factor
1,662
System created by Poznań University of Technology
and Poznan Supercomputing and Networking Center
Log in through eKonto to add to SIS