Title
Comparison of efficiency of electrostatic micro-actuators for precise positioning
Authors
Year of publication
2013
Article type
scientific article
Publication language
english
Keywords
EN
- electrostatic micro-actuator
- Laplace equation
- higher-order finite element method
Abstract
EN Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive higher-order finite element method, using a code developed by the authors. The methodology is illustrated by typical examples whose results are discussed.
Pages (from - to)
29 - 34
Full text of article
Access level to full text
public
Ministry points / journal
9
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