Title
Image processing methods for interferometric shape deviation measurements with sub-micron resolution
Authors
[ 1 ] Instytut Technologii Mechanicznej, Wydział Budowy Maszyn i Zarządzania, Politechnika Poznańska | [ P ] employee
Year of publication
2016
Chapter type
abstract
Publication language
english
Keywords
EN
- shape deviation measurements
- non-tactile methods
- optical measurements
- physics
- surface metrology
Pages (from - to)
147 - 148
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