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Article


Title

A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision

Authors

[ 1 ] Instytut Technologii Mechanicznej, Wydział Inżynierii Mechanicznej, Politechnika Poznańska | [ P ] employee | [ S ] student

Scientific discipline (Law 2.0)

[2.8] Mechanical engineering

Year of publication

2020

Published in

Bulletin of the Polish Academy of Sciences. Technical Sciences

Journal year: 2020 | Journal volume: vol. 68 | Journal number: no. 3

Article type

scientific article

Publication language

english

Keywords
EN
  • scatterometry
  • surface texture
  • optical measurement systems
  • surface metrology
  • surface roughness
Pages (from - to)

485 - 490

DOI

10.24425/bpasts.2020.133364

URL

http://journals.pan.pl/Content/116520/PDF/10_485-490_01475_Bpast.No.68-3_30.06.20_K3A_TeX.pdf

License type

CC BY-NC-ND (attribution - noncommercial - no derivatives)

Open Access Mode

open journal

Open Access Text Version

final published version

Date of Open Access to the publication

at the time of publication

Points of MNiSW / journal

100.0

Points of MNiSW / journal in years 2017-2021

100.0

Impact Factor

1.662

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