Behavioral modelling and simulation of microelectromechanical gyroscopes
[ 1 ] Instytut Robotyki i Inteligencji Maszynowej, Wydział Automatyki, Robotyki i Elektrotechniki, Politechnika Poznańska | [ P ] employee
[2.2] Automation, electronics, electrical engineering and space technology
2023
paper
english
- MEMS
- microelectromechanical gyroscope
- angular velocity
- Coriolis force
- VHDL-AMS
- hAMster
EN In the paper, creation of the hehavioral models of the microelectromechanical tuning fork and comb-drive gyroscopes using VHDL-AMS is discussed. The created VHDL-AMS models make it possible to simulate the dynamics, capacitance changes and output voltages, currents of the sensitive element (proof mass) of the microelectromechanical tuning fork and comb drive gyroscopes depending on the applied angular velocity as well as to perform the device analysis at the behavioral level. The behavioral simulation of the sensitive element of the MEMS gyroscopes using the created models in the hAMSter software is conducted.
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