Behavioral Modelling and Simulation of Microelectromechanical Gyroscopes
[ 1 ] Instytut Robotyki i Inteligencji Maszynowej, Wydział Automatyki, Robotyki i Elektrotechniki, Politechnika Poznańska | [ P ] employee
[2.2] Automation, electronics, electrical engineering and space technology
2024
chapter in monograph / paper
english
- Micro-Electro-Mechanical Systems (MEMS)
- integrated angular velocity microsensor
- angular velocity
- Coriolis force
- computer-aided design
- VHDL-AMS
- hAMster
EN In this paper, behavioral modelling and simulation of the microelectromechanical tuning fork and comb-drive gyroscopes (MEMS angular velocity sensors) have been performed. The models of MEMS angular velocity sensors are developed that make it possible to simulate capacitance changes, output voltages and currents depending on the applied angular velocity and also to perform the behavioral analysis of integrated devices.
30 - 39
CC BY-NC-ND (attribution - noncommercial - no derivatives)
other
final published version
at the time of publication
public
20