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The effect of UV and thermally induced oxidation on the surface and structural properties of CVD diamond layers with different grain sizes


[ 1 ] Instytut Badań Materiałowych i Inżynierii Kwantowej, Wydział Inżynierii Materiałowej i Fizyki Technicznej, Politechnika Poznańska | [ 2 ] Instytut Fizyki, Wydział Inżynierii Materiałowej i Fizyki Technicznej, Politechnika Poznańska | [ P ] employee

Scientific discipline (Law 2.0)

[2.8] Materials engineering

Year of publication


Published in

Diamond and Related Materials

Journal year: 2021 | Journal volume: vol. 121

Article type

scientific article

Publication language


  • CVD diamond films
  • Raman spectroscopy
  • surface properties
  • structure properties
  • surface chemistry
  • oxidation

EN This work is a continuation of previously reported research regarding the effects of hydrogen treatment on the structural properties of polycrystalline CVD diamond layers with different grain sizes [1]. Here, we report studies of the hydrogenated diamond layers which were oxidized in two steps, first by UV irradiation in air and then by annealing at 300 °C in air. After each process step, the structural and surface properties of diamond layers were monitored by Raman spectroscopy, SEM, XPS, and CA (contact angle) measurements. The reported study investigates the impact of the UV ozone oxidation and the low-temperature thermal oxidation on the chemical composition, morphology of diamond surface, and structural properties of the diamond layer. This work shows that microcrystalline and nanocrystalline diamond layers behave differently upon oxidation. In general, the microcrystalline samples were more readily oxidized during UV treatment. This might be attributed to both, the diamond grain sizes, and the less ordered form of the amorphous carbon phase present in those samples. Also, the structural studies revealed that a slight ordering of amorphous carbon phase in the microcrystalline sample with the biggest diamond grains occurred for both oxidation processes, implicating the graphitization of the sp2/sp3 phase.

Date of online publication


Pages (from - to)

108739 - 1 - 108739 - 13





Article Number: 108739

Ministry points / journal


Ministry points / journal in years 2017-2021


Impact Factor


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