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Article

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Title

CMOS- compatible fabrication method of graphene-based micro devices

Authors

[ 1 ] Instytut Fizyki, Wydział Fizyki Technicznej, Politechnika Poznańska | [ 2 ] Centre for Advanced Technologies, Adam Mickiewicz University | [ 3 ] Instytut Badań Materiałowych i Inżynierii Kwantowej, Wydział Fizyki Technicznej, Politechnika Poznańska | [ P ] employee | [ S ] student

Scientific discipline (Law 2.0)

[2.8] Materials engineering

Year of publication

2017

Published in

Materials Science in Semiconductor Processing

Journal year: 2017 | Journal volume: Vol. 67

Article type

scientific article

Publication language

english

Keywords
EN
  • Graphene
  • Devices fabrications
  • Optical lithography
  • Magnetic field sensor
Date of online publication

19.05.2017

Pages (from - to)

92 - 97

DOI

10.1016/j.mssp.2017.05.021

Ministry points / journal

30

Ministry points / journal in years 2017-2021

30

Impact Factor

2,593

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